Amod PVD Vacuum Coating Systems
Angstrom Engineering modular (Åmod) PVD vacuum coating systems are designed specifically to meet the needs of current research, development and pre-production applications.
Our economical solution to a modular PVD system provides the flexibility to configure an advanced system that can be easily modified as your technology develops.
The Amod Series base configuration consists of two sections, a 19" electrical rack for the control interface and an enclosed frame for the high vacuum chamber.
The Amod Series high vacuum chamber is specially designed for easy glove box integration, similar to our larger integrated vacuum chamber glove box systems. With the glove box option the Amod system is perfectly suited for laboratory scale thin film deposition processes highly sensitive to atmospheric conditions.
The system is capable of handling single large diameter substrates or multiple small substrates on a single substrate holding plate. The system allows a variety of process combinations including resistive thermal evaporation, electron beam and sputtering applications.
Please refer to the system configuration section of this page for more detailed information on available options and upgrades.
Amod Series Standard System Features
The Amod flexible base system offers superior standard features for a very competitive price, and can be shipped from our facility in as little as 16 weeks. Powerful process features have been designed into a small system footprint, making the Amod a perfect solution for restricted lab space or multiple system integrations. The following information details the system features included in every Amod flexible base system.
- Universal Ø20" Base Flange Weldment
- Separate Control Rack and Base Frame
- 1500 l/s Cryogenic Pumping Package
- Cryopump Monitor w/ Digital Readout
- 10 cfm Rotary Vane Mechanical Pump
- 4U Rack-Mount PC Computer
- Microsoft Windows XP Pro Operating System
- Windows Based SCADA - PLC Control Interface Software With Auto-Sequence & Manual Mode System Operation Through a Schematically Based Real Time Interface
- 17" LCD Monitor w/ Standard Keyboard & Mouse
- Pneumatic Vacuum Control Valving
- Full-Range Vacuum Pressure Gauge
- Omron PLC & Electronic Control Modules
- Field Evaluated to Meet CSA SPE-1000 Certification
For additional information on available options and upgrades please refer to the system configuration section of this page.
Thin Film Deposition Process Applications
Our Amod Series thin film deposition systems are engineered for diverse PVD applications. An ongoing increase in technological development has lead to a variety of successful project ventures including, but not limited to, the following applications.
- Thermal Evaporation
- Direct Current DC Sputtering
- Radio Frequency RF Sputtering
- Electron Beam Evaporation
- DC and RF Sputter Deposition
- Combined Resistive Sputter and Electron Beam
- In Situ Substrate Heating up to 600°C
- Glow Discharge Plasma Cleaning
- OLED and LED Research and Fabrication
- Thin Film Photovoltaic Research and Development
- Thin Film Nanotechnology
- Materials Research
- Lens Coating
- Semiconductor
- Memory Storage Devices
- Organic Research and Technology
- Thin Film Medical Devices
- Pharmaceutical Applications
- Metallization
We at Angstrom Engineering would be more then happy to discuss our previous experience and ongoing research with you. If you would like further information on our Amod thin film PVD systems or any other Angstrom product please don't hesitate to contact us, we look forward to speaking with you.
To better understand the flexibility of our Amod systems, and the benefit they can provide to your process applications please refer to the system configuration section of this page.
Amod Series Process Configuration Options
The foundation of every Amod Series product is our flexible base system with currently over 60 options or upgrades to choose from, ensuring each customer has the capability to configure the Amod to meet their technological needs.
Complete system configurations with automated deposition control can be provided starting as low as $99,200.00 USD. When comparing feature to feature the Amod system is one of the most competitively priced systems currently available, add that to Angstrom's increasingly renown customer support and you have an unparalleled solution to an extremely diverse range of thin film technology applications.
The following information outlines some of the general system configuration options currently available. For more detailed information or to request an Amod system quotation please contact Angstrom Engineering.
- 20" cubic Aluminum glove box integratable vacuum chamber including front and rear hinged door assemblies, two sets of removable debris shields, and a geometric design suited for system extensions or upgrades.
- Vacuum pump upgrades, consisting of alternate trade names such as CTI or different pump styles all together such as Turbo pumping package options. In addition to high vacuum pump options there is also an upgrade available for a dry scroll roughing pump.
- Thermal evaporation source configurations starting at 1 source single deposition capability, ranging to 6 source triple codeposition capability in 1 source increments.
- Shutter assembly options can be selected for either depositions sources and/or substrate concealing capabilities.
- Electron beam evaporation source options include a 3kW or 6kW power supply with source crucible volumes of 2cc, 7cc, 15cc, 25cc or 30cc.
- Sputter deposition system options range from 1 to 3 US Inc. planar magnetron sources of either 2" or 3" in size, paired with a 1.2kW Glassman High Voltage regulated DC power supply with the option to select a variety of alternate RF power supplies and codeposition capabilities. In combination with a sputter deposition option a diverse range of gas pressure control options are available in either upstream or downstream multiple gas configurations.
- Radak 1 evaporation source option includes a single Radak 1 or OLED 1 furnace, an integrated thermocouple feedthrough, the power transformer, an Omron E5CK temperature controller and an SCR power control unit enabling temperature or deposition rate control capability.
- Deposition rate monitoring / control option includes the SQS-242 Sigma Instruments Windows based deposition control software, an SQM-242 Sigma PCI deposition control card, with a basic crystal sensor and vacuum feedthrough. Optional upgrades incorporate additional crystal sensors, vacuum feedthroughs, additional control cards and an analog card for enhanced data-logging capabilities.
- Substrate stage assembly options include a specialized holder capable of supporting large diameter substrates with 0-50 RPM continuous rotation. Upgrades include physical mask patterning, linear stage manipulation of 2" - 4", and in situ radiant backside heating to achieve substrate temperatures up to 600°C.
- Chamber integratable glove box option includes a custom 3 port glove box configuration (w/ stand), a 15" antechamber and a single column gas purification system with solid state oxygen and water content analyzers. Available options include a 6" antechamber, a programmable automatic antechamber controller and an antechamber auto door lock system.
The flexibility of the Amod system and the multitude of available options and upgrades enables a configuration to meet almost every need. However if your needs require a completely custom system we have the years of experience and expertise to provide a competitive solution for your application. Please refer to our custom system pages for further information and examples of previously manufactured custom configurations.