CoVap Series
Compact Systems
The CoVap Series is an ideal solution for thin film deposition research on an economical budget. Advanced deposition rate control in a compact package distinguishes the CoVap from the competition.
With the Sigma Instruments SQC deposition controller system users can produce more reliable and accurate multi-layer depositions than with a manually controlled process.
25 thin film process recipes with up to 250 layers and 25 materials can be stored on the SQC controller. An RS232 interface port enables program downloads from any computer running Sigma's Windows based development software provided with the system.
Pfeiffer compact turbo pumping backed by a dry diaphragm pump provides a vacuum base pressure less than 9.0E-07 Torr. A display control unit enables auto pump down and venting system operations.
With a price starting at $48,700 USD a CoVap type-R thermal evaporator provides unparalleled equipment features when compared to competitive technologies. At no additional charge Angstrom Engineering includes up to 2 days of on site system operation training at our facility with every purchase.
Please refer to the thin film process configuration section of this page for more detailed information on available options and upgrades.
CoVap Series Standard System Features
Consuming a floor plan footprint of less than 2 feet wide and 3 feet deep with an overall height of less than 5 feet the CoVap Series is extremely compact and fits well into restricted lab space areas.
The CoVap is offered in three base system configurations as a thermal evaporator (type-R), sputtering system (type-S) and electron beam evaporator (type-E). The following information details the system features common to each deposition type.
- Ø10" x 17"H Lift-Off Vacuum Chamber
- Single Unit 19" Electrical Rack Frame Enclosure
- Pfeiffer Vacuum 60 l/s Turbo Molecular Drag Pumping Package
- 1.4 cfm Dry Diaphragm Mechanical Backing Pump
- Compact Full Range Pirani / Cold Cathode Vacuum Gauge
- Sigma Instruments SQC-122 Deposition Controller Unit
- Single Quartz Crystal Rate Sensor
- Substrate Stage Fixturing
- type-R, type-S or type-E Source Configuration
- Field Evaluated to Meet CSA SPE-1000 Certification
For additional information on available options and upgrades please refer to the thin film process configuration section of this page.
CoVap Series Process Configuration Options
The foundation of every CoVap Series configuration is the standard feature base system offered as a complete ready to use solution.
The Angstrom CoVap design provides you with an economical product while maintaining the flexibility to configure a unique solution with several available options to meet the needs of your research application.
Compared feature to feature with other available compact systems on the market today the CoVap Series is one of the most all inclusive and competitively priced thin film systems available.
The following information outlines the equipment configuration options that set the CoVap apart from the competition. For a complete list of options or to request a quotation please use the Angstrom Engineering online RFQ form to contact our sales department.
- Codeposition Process Control Upgrade: Includes a water cooled high current common electrical feed through, an additional SCR power controller, an upgrade to a Sigma SQC-222 codeposition controller and an additional quartz crystal rate sensor. This upgrade enables the CoVap type-R to cooperatively evaporate and accurately control two thin film material layers simultaneously.
- 2-Port Glove Box Integration Upgrade: Includes an integration style vacuum chamber, a counterbalance chamber hoist with a guide rail motion system and a 2-port glove box with a single column gas purification system, an auto purge valve and solid state O2 and H2O analyzers. Optional 6" and 15" antechamber may be configured as necessary depending on the application.
- Process Automated Substrate Shutter Assembly Option: Is pneumatically controlled by an output signal from the Sigma SQC deposition controller, and will block thin film material vapor on substrate sizes up to 100 mm in diameter.
- Substrate Mask Support Plate Option: Includes an Aluminum clamp ring to support shadow mask pattern sheets, and is easily interchanged on the substrate holder to produce complete devices in a single CoVap Series system.
If you would like to learn more about CoVap Series compact systems or request a quote please use our online RFQ form or feel free to phone us directly at extension #202.