Electron Beam Evaporation
Feature Benefits:
- High power density and a wide range of control over evaporation rates, from very low to very high.
- Evaporation material is contained in a water cooled copper hearth eliminating any problems related to crucible contamination.
- Multiple pocket crucible configurations enable a variety of materials to be sequentially evaporated for a single process application.
- Isolated crystal rate sensors ensure process accuracy and reliability.
- Mirrors are mounted as necessary to monitor process operation and electron beam sweep patterns through a vacuum chamber view port.
- Electron beam evaporation sources can be combined with other vacuum evaporation technologies to produce complete thin film system solutions.
- Crucible liners of carbon and other refractory materials are available for applications involving pure metals that are good thermal conductors.
Electron Beam Products
The electron beam evaporation sources shown throughout the images on this page were designed for research and development involving high vacuum evaporation of pure metallic elements in addition to numerous alloys and compounds.
Thin film research applications making use of electron beam evaporation technology include medical, metallurgical, telecommunication, micro electronics, optical coating, nanotechnology and the semiconductor industry.
Electron beam evaporation offers considerable advantages over comparable thin film PVD process technologies with precise deposition rate control, excellent material utilization, sequential and co-deposition configurations, in addition to uniform low temperature deposition.
Electron beam thin film processing also offers higher evaporation rates, freedom from contamination, very low rate deposition control, precise thin film composition and cooler substrate temperatures.
An electron beam evaporator is an ideal solution to many research and development applications due to readily available material in a variety of forms, efficient material utilization, along with good film purity and uniformity.
Angstrom Engineering has extensive experience in the customization of electron beam deposition systems, providing a considerable customer advantage when configuring a vacuum solution to meet your needs.
Electron beam evaporation options are offered in both our Amod and EvoVac product lines, in addition to fully customized system developments.
If you have an application for a thin film electron beam evaporator and would like to know more about the advantages Angstrom Engineering can provide please use our online RFQ form to request more information.