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Corporate Introduction Issue

New Integrated Glove Box Systems

Over the past year Angstrom Engineering has developed a system that combines a thin film vacuum deposition system with the added flexibility of an integrated glove box environment.

This system is ideally suited for the customer that requires substantial
flexibility when working with materials that are sensitive to atmospheric moisture and/or oxygen.

Each system can be custom designed to suit our customer's requirements. There is no longer a need to conform to pre-existing deposition styles and/or source arrangements, which could result in less than ideal product development.

A general system configuration consists of a 28" square 304 SSTL chamber that is approximately 20" deep, integrated to a four-port glove box. Two ports enable dual handed source and substrate manipulation within the vacuum chamber for process preparation when the front door of the system is open. The other two ports are used for handling the customer's materials, substrates, or additional tooling in the main portion of the glove box. 

The chamber itself has two access doors, a front door that slides to the side on rails while accessing the chamber interior through the glove box, and a hinged back door for performing periodic maintenance and cleaning from the laboratory.

More information? Select either of the images to the right.

Integrated Vacuum Chamber Glove Box Systems
Figure 1.  Integrated Glove Box - Front View, Chamber Door Closed.


Integrated Vacuum Chamber Glove Box Systems
Figure 2.  Integrated Glove Box - Chamber Door Open, Glove Port Panel Removed.

Angstrom's Recent Building Expansion

Our facility in Cambridge, Ontario, Canada, has recently gone through a building expansion. In doing so, we have approximately doubled our manufacturing floor space, which now includes a class 1000 clean room.

In total our facility spans approximately 5,000 square feet, divided approximately 60/40 between the manufacturing area and office space respectively.

Our expansion enables a larger number of systems to be produced simultaneously, providing increased manufacturing efficiency, resulting in accurate reproducible lead times.
 

Figure 3.  Class 1000 Clean Room - Front Door View.

In House System Development

Due to the ongoing growth and necessity of process development, Angstrom Engineering has ventured into the production of a flexible modular in-house glove box integrated vacuum deposition system.

The concept of this system is to provide thin film analysis for a variety of geometric source arrangements, in addition to multiple deposition styles. By interchanging a removable 14" ConFlat the system can be configured to utilize co-deposition of resistive evaporation and an alternative source style, such as the examples shown to the right.

This system will also be available to provide substrate coatings for those in need of specific thin film operations without the resources to purchase a full deposition system.

As described above Angstrom has now installed a class 1000 clean room, to accommodate our future in-house system.

Figure 4.  Sample Source Arrangement - Two 3" Sputters & 5 Thermal Resistive.


Figure 5.  Sample Source Arrangement - One 4 Pocket E-beam & 5 Thermal Resistive.

Aluminum Deposition Source Research

The inherent wetting characteristics of Aluminum to almost all readily available source materials has led Angstrom Engineering into the research and development of an alternative thermal evaporation source.

Our hope is to develop a custom source capable of large capacity resistive Aluminum evaporation. This source should aid in improving on many current process issues involved in the development of OLED technology.  

Although our research is currently centered on providing a large scale resolution to the resistive source problem, the technology we are researching indicates a strong possibility for adapting to a variety of applications.
 

Next Exhibiting Trade Show

Upcoming conferences that Angstrom Engineering will be hosting a booth at are shown to the right.
Society of Vacuum Coaters
Dallas, Texas
April 26-27, 2004
Booth number: TBD

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