EvoVac Vacuum Deposition Systems
The next evolution in vacuum thin film deposition technology is here! EvoVac deposition systems are designed specifically to meet the demands of next generation research applications.
The modular design of the EvoVac will enable you to configure a system that has the flexibility to change along with your research. The base configuration of an EvoVac consists of two main sections, a standard 19" electrical control rack and a frame to support deposition sources, the high vacuum chamber and the PLC electronics.
The unique design of the EvoVac chamber enables glove box integration similar to our Amod Series. With an optional glove box an EvoVac system is perfectly suited for larger scale laboratory research applications highly sensitive to atmospheric conditions.
EvoVac systems are capable of combining multiple thin film deposition sources, using up to ten thermal evaporation sources, electron beam evaporation, or four magnetron sputtering targets.
Please refer to the system configuration section of this page for more detailed information on available options and upgrades.
EvoVac Series Standard System Features
EvoVac thin film deposition systems offer a powerful package at a competitive price and can be shipped from our facility in as little as 16 weeks. Extensive flexibility and modular component combinations make the EvoVac a perfect solution for unique research environments or a multiple system installation. The following information details the system features included in every EvoVac series base system.
- Universal 26" x 19" Base Flange
- Separate Electrical Enclosure and Base Module Frame
- Austin Scientific 1500 L/s Cryogenic Pumping Package
- Cryopump Monitor with Digital Readout and Dual Setpoints
- 18 cfm Rotary Vane Mechanical Pump with Mist Eliminator
- 4U Rack-Mount PC Control Computer
- Microsoft Windows XP Pro Operating System
- Windows Based SCADA - PLC Control Interface Software with Auto-Sequence & Manual Mode System Operation Through a Schematically Based Real Time Interface
- 17" LCD Monitor with Keyboard and Mouse
- Pneumatic Vacuum Control Valving
- Full-Range Vacuum Pressure Gauging
- Omron PLC and Electronic Control Modules
- Field Evaluated to Meet CSA SPE-1000 Certification
For additional information on available options and upgrades please refer to the system configuration section of this page.
EvoVac Series Process Configuration Options
The foundation of every EvoVac series thin film deposition system is the standard feature base system with nearly 70 available options to choose from.
The EvoVac design provides you with the advantage of configuring a vacuum deposition solution to specifically meet the needs of your application.
Compared feature to feature with competitive technology the EvoVac Series is one of the most powerful, flexible, and competitively priced vacuum deposition systems currently available. When you add to that the unrivaled customer service and support provided by Angstrom Engineering the result is an unparalleled solution to a diverse range of thin film applications.
The following information outlines some of the thin film process configurations setting the EvoVac apart from the competition. For a complete list of options or to request a quote please use the Angstrom Engineering online RFQ form or feel free to contact our sales department directly at extension #202.
- EvoVac-X00-G: A thin film evaporator including ten thermal resistive sources with an integrated 4 port glove box which is capable of up to six source co-deposition processes. This system is ideally suited for pre-production research applications and can support large area substrates for scaling up next generation thin film technology. Refer to the image on the right for EvoVac and Amod series thermal resistive evaporation source size limitations.
- EvoVac-040: A sputter deposition system with four sputtering targets of up to 4 inches in diameter and can be configured with a combination of radio frequency RF and direct current DC power supplies. The EvoVac will maintain a partial pressure environment with up to four independent sputtering gases managed by either an upstream or downstream control system using mass flow controllers (MFC). Optional vacuum relay switching enables multiple sputter source configurations using a single sputtering power supply if co-deposition sputtering is not a requirement in your application.
- EvoVac-001: An electron beam evaporator with single pocket to multiple hearth configurations. Our standard multiple hearth electron beam source includes a 6 x 20cc pocket volume and has a max operating power of 8 kW. EvoVac electron beam evaporators are a perfect solution for complex evaporation materials and thick film metallization process applications.
- EvoVac-X01: An ideal example of the configuration power behind an EvoVac thin film evaporator. The X01 series system includes ten thermal resistive sources and a multiple pocket electron beam source enabling up to a six source co-deposition process. With the X01 you will never have to worry about having enough flexibility in your equipment to tackle even the most demanding thin film research applications.
- EvoVac-521: The perfect blend all in a single PVD coating system. The 521 series vacuum deposition system includes five thermal evaporation sources, two sputtering sources, and a multiple hearth electron beam source. With the flexibility to evaporate almost any material combined with sputter deposition processing complete device research applications can be accomplished in a single vacuum chamber.
- EvoVac-500-R3: Of the EvoVac thin film evaporators the 500-R3 series combines the reliability of thermal resistive sources with the fine control of Radak or OLED furnace evaporation. The 500-R3 series evaporator includes five vacuum thermal evaporation sources and three Radak-1 or OLED-1 furnaces. Furnace integrated thermocouples combined with vacuum deposition rate control enables up to six source co-deposition process applications.
- Glove Box Options: Every EvoVac system is capable of glove box integration. Our customized 4-port glove box option transforms an EvoVac deposition system into the ideal solution for oxygen or moisture sensitive thin film research. A variety of standard glove box options are available in addition to the flexibility to custom configure multiple glove boxes to provide complete solutions to the challenges facing your research.
The power of the EvoVac system and the multitude of available options and upgrades enables a configuration to meet your demands. If you would like to learn more about EvoVac series equipment or request a quote please use our online RFQ form or feel free to contact us directly at extension #202.