Nexdep Series
Thin Film Evaporators
Angstrom Nexdep Series thin film evaporators are the perfect blend between a low cost solution and equipment configuration flexibility.
Accurate and repeatable automated deposition rate control in a compact and easy to use package distinguishes the Nexdep Series from the competition.
The Sigma Instruments SQC deposition controller is ideal for automating a thin film evaporation process by controlling deposition rate and thickness for multiple material layers applications.
25 thin film process recipes with up to 250 layers and 25 materials can be stored on the SQC unit at any one time. An RS232 computer interface port enables users to download process recipes developed on a PC using Sigma's Windows bases software provided with the system.
The Nexdep vacuum chamber will reach a base pressure of less than 9.0E-07 Torr in a clean, dry and empty system using a Pfeiffer turbo pumping package. A display control unit enables single button auto pump down and venting system operations.
The Nexdep may be configured with up to 4 thermal evaporation sources, a multiple pocket electron beam source, or a combination of thermal and electron beam evaporation technology using a compact e-beam source. Due to the multitude of available options system pricing may vary depending on the requested specifications.
Please refer to the thin film process configuration section of this page for more detailed information on available options and upgrades.
Nexdep Series Standard System Features
Consuming a floor space of less than 2 feet wide and 3 feet deep with an overall height of less than 7 feet the Nexdep system is compact and fits well into restricted lab space areas. The following information details the system features included in every Nexdep Series base thin film evaporator.
- 16"W x 20"H Aluminum D-Shaped High Vacuum Chamber
- Single Unit Frame Enclosure with a Standard 19" Electrical Rack
- Pfeiffer Vacuum 210 l/s Turbo Molecular Drag Pumping Package
- 7 cfm Two Stage Rotary Mechanical Backing Pump with Mist Filter
- Compact Full Range Pirani / Cold Cathode Vacuum Gauge
- Automated Single Button Vacuum Pump Down and Venting
- Single Quartz Crystal Rate Sensor
- Wiring and Signal Relays Included for Process Automation
- Field Evaluated to Meet CSA SPE-1000 Certification
For additional information on available options and upgrades please refer to the thin film process configuration section of this page.
Nexdep Series Process Configuration Options
The foundation of every Nexdep Series thin film evaporator is the standard feature base system offered with approximately 25 options or upgrades to choose from.
The Angstrom Nexdep design provides you with a competitively priced product while maintaining the flexibility to configure a thin film solution with numerous options to meet your evaporation needs.
The following information outlines some of the available equipment configuration options setting the Nexdep apart from the competition. For a complete list of options or to request a quotation please use the Angstrom Engineering online RFQ form to contact our sales department.
- 4-Source Thermal Evaporator with Codeposition Process Control: Includes 4 thermal evaporation sources with deposition shutters, 2 SCR power controllers, a Sigma SQC-222 codeposition controller and 2 quartz crystal rate sensors. This configuration enables the Nexdep to cooperatively evaporate and accurately control two thin film material layers simultaneously.
- 4-Pocket Electron Beam Evaporator: Includes a multiple pocket electron beam source with a deposition shutter and a choice of crucible size from 2, 15, 25 or 30cc, in addition to a Sigma SQC-122 deposition controller and a quartz crystal rate sensor. This configuration enables the Nexdep to sequentially evaporate from one to four thin film material layers and is ideally suited for high temperature melting points.
- Thermal / Electron Beam Evaporator with Codeposition Control: Includes a thermal evaporation source and a 4 x 2cc multiple pocket electron beam source with deposition shutters, an SCR power controller, a Sigma SQC-222 codeposition controller and 2 quartz crystal rate sensors. This configuration enables the Nexdep to cooperatively evaporate two thin film materials between thermal and electron beam source technologies for the ultimate evaporation research flexibility.
- Substrate Stage Options: Include continuous rotation from 0-50rpm, physical shadow masking, substrate heating or water cooling.
If you would like to learn more about the Nexdep thin film evaporator or request a quote please use our online RFQ form or feel free to phone us directly at extension #202.