Resistive Thermal Evaporation
This Design Includes:
- Up to ten (10) thermal evaporation source boats.
- 1500 l/s low profile cryogenic pumping package.
- Codeposition source control using crystal sensor rate controllers and Sigma Instruments deposition control software.
- Electronic vacuum flange hoists allowing a user to raise and lower the main system flanges for quick and easy access to the interior of the system.
- A built in standard nineteen (19) inch electrical rack to house the systems computer in addition to other rack mountable components.
- Fully automated PLC system control allowing automated or manual vacuum pump down, venting and cryo pump regeneration cycles.
- Two sets of deposition debris shielding to minimize vacuum chamber thermal evaporation build up.
- A magnetic manipulator transfer arm may be attached to the system with an optional vacuum load lock to introduce deposition substrates without breaking vacuum.
Thermal Evaporation Products
The resistive thermal evaporation system shown throughout the images on this page was designed for research and development involving organic materials science, organic light emitting diode technology, and flexible OLED display barrier coatings.
Our thermal evaporation system may be easily adapted for a variety of leading edge research fields including organic light emitting diodes (OLED), flat panel displays, solar panels, photovoltaics, nanotechnology, materials science, thin film battery metallization and much more.
The electrical panel shown to the right within the thermal evaporation frame is hinged on one side so that it may be swung out from the system for any major electrical modifications or easy future expansion.
Stainless steel cover panels (Front panel removed in the image to the right.) are mounted in each frame section to safely enclose the system. Panel safety interlocks prevent use of the thermal evaporation system controls while any panels are removed.
The substrate stage assembly shown to the right includes two single axis linear manipulators to adjust thermal evaporation source boat to substrate distance while also being used to connect substrates to the stage after transfer through a vacuum load lock.
The housing included with the transfer stage can be easily modified and upgraded with substrate heaters to achieve direct sample heating temperatures of up to six hundred (600) degrees Celsius or eleven hundred (1100) degrees Fahrenheit.
Every sample stage comes with continuous rotation capability and variable speed control.
Vacuum flange hoists may be rotated in either direction to allow increased access to the vacuum chamber interior.
The substrate shutter provided will block thermal evaporation material for a wide range of substrate wafer diameters or custom glass substrate shapes and sizes.
Vacuum base pressure in our cryo pumped thermal evaporation system is less than 5.0E-8 Torr with elastomer sealed vacuum flanges and can be improved upon with alternate pumping or a metal vacuum flange sealing system.
Each thermal resistive source boat has an individually supplied high power vacuum feedthrough with a shared water cooled high current vacuum feedthrough return. This configuration allows the thermal evaporation system to operate a four (4) resistive source codeposition process.
Optional individual thermal source shutters may be provided, and can be activated separately.
Source isolation shielding is provided between each resistive boat that also acts as a radiant heat shield.
Optional resistive clamp extensions may be purchased to adapt the system to various sized evaporation boats. Boat flexibility allows the system to be easily used for both organic and metallic thermal evaporation depending on your application.